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Loại tài liệu: Tài liệu số - Journal Article
Thông tin trách nhiệm: Hoex, Bram; Hossain, Md. Anower; Khoo, Kean Thong; Cui, Xin; Poduval, Geedhika K; Zhang, Tian; Li, Xiang; Li, Wei Min
Nhà Xuất Bản: Elsevier
Năm Xuất Bản: 2020
Atomic layer deposition (ALD) can synthesise materials with atomic-scale precision. The ability to tune thernmaterial composition, film thickness with excellent conformality, allow low-temperature processing, and in-siturnreal-time monitoring makes this technique very appealing for a wide range of applications. In this review, wernfocus on the application of ALD layers in a wide range of solar cells. We focus on industrial silicon, thin film,rnorganic and quantum dot solar cells. It is shown that the merits of ALD have already been exploited in a widernrange of solar cells at the lab scale and that ALD is already applied in high-volume manufacturing of silicon solarrncells.
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